Page 293 - Mechanical design of microresonators _ modeling and applications
P. 293
0-07-145538-8_CH05_292_08/30/05
Resonant Micromechanical Systems
Downloaded from Digital Engineering Library @ McGraw-Hill (www.digitalengineeringlibrary.com)
Copyright © 2004 The McGraw-Hill Companies. All rights reserved.
Any use is subject to the Terms of Use as given at the website.
