Page 291 - Mechanical design of microresonators _ modeling and applications

0-07-145538-8_CH05_290_08/30/05

Resonant Micromechanical Systems

290 Chapter Five

8. Z. Li, Z. Yang, Z. Xiao, Y. Hao, G. Wu, and Y. Wang, A bulk micromachined
lateral gyroscope fabricated with wafer bonding and deep trench etching,
Sensors and Actuators, 83, 2000, pp. 24–29.
9. W. L. Wood, Practical Time Stepping Schemes, Clarendon Press, Oxford,
1990.
10. K. B. Lee and L. Lin, Vertically supported microresonators, 12th
International Conference on Solid State Sensors, Actuators and
Microsystems, 2003, pp. 847–850.
11. R. E. Mihailovich, and N. C. MacDonald, Dissipation measurements of
vacuum-operated single-crystal silicon microresonators, Sensors and
Actuators A, 50, 1995, pp. 199–207.
12. A. Husain, J. Hone, H. W. Ch. Postma, X. M. H. Huang, T. Drake, M. Barbic,
A. Scherer, and M. L. Roukes, Nanowire-based very-high-frequency
electromechanical resonators, Applied Physics Letters, 83(6), 2003, pp.
1240–1242.
13. J. P. Jakubovics, Magnetism and Magnetic Materials, University Press,
Cambridge, England, 1994.
14. T. Fujita, K. Maenaka, and M. Maeda, Design of two-dimensional
micromachined gyroscope by using nickel electroplating, Sensors and
Actuators A, 66, 1998, pp. 173–177.
15. Z. Li, Z. Yang, Z. Xiao, Y. Yao, T. Li, G. Wu, and Y. Wang, A bulk
micromachined lateral gyroscope fabricated with wafer bonding and deep
trench etching, Sensors and Actuators A, 83, 2000, pp. 24–29.
16. H. Yang, M. Bao, H. Yin, and S. Shen, A novel bulk micromachined
gyroscope based on a rectangular beam-mass structure, Sensors and
Actuators A, 96, 2002, pp. 145–151.
17. H. Kawai, K.-I Atsuchi, M. Tamura, and K. Ohwada, High-resolution
microgyroscopes using vibratory motion adjustment technology, Sensors
and Actuators A, 90, 2001, pp. 153–159.
18. W. Geiger, B. Folkmer, U. Sobe, H. Sandmaier, and W. Lang, New designs
of micromachined vibrating rate gyroscopes with decoupled oscillation
modes, Sensors and Actuators A, 66, 1998, pp. 118–124.
19. S. Nakano, T. Toriyama, and S. Sugiyama, Sensitivity analysis for a
piezoresistive rotary movement micro gyroscope, 2001 International
Symposium on Micromechanics and Human Science, pp. 87–92.
20. F. Ayazi, and K. Najafi, A HARPSS polysilicon vibrating ring gyroscope,
Journal of Microelectromechanical Systems, 10(2), 2001, pp. 169–179.
21. N. Yazdi, F. Ayazi, and K. Najafi, Micromachined inertial sensors,
Proceedings of IEEE, 1998, pp. 1640–1659.
22. K. Y. Park, C. W. Lee, Y. S. Oh, and Y. H. Cho, Laterally oscillated and
forced-balanced vibratory rate gyroscope supported by fish hook shape
springs, Proceedings of IEEE, 1997, pp. 494–499.

Downloaded from Digital Engineering Library @ McGraw-Hill (www.digitalengineeringlibrary.com)
Copyright © 2004 The McGraw-Hill Companies. All rights reserved.
Any use is subject to the Terms of Use as given at the website.