Page 290 - Mechanical design of microresonators _ modeling and applications

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Resonant Micromechanical Systems

Resonant Micromechanical Systems 289
seismic mass flexure hinge

acceleration

micro resonator

anchor
Figure 5.67 Resonant bar microaccelerometer.

It should be mentioned that resonant gyroscopes and accelerometers
are characterized by performance parameters such as resolution, drift,
zero-rate output, angle random walk, scale factor accuracy, or full-scale
36
21
range (for more details, see Lefevre or Yazdi, Ayazi, and Najafi .
These performance criteria enable the ranking of resonant micro-
devices into rate-grade, tactical-grade, and inertial-grade categories in
an ascending-quality order.

References

1. Z. Xiao, X. T. Wu, W. Peng, and K. R. Farmer, An angle-based design
approach for rectangular electrostatic torsion actuators, Journal of
Microelectromechanical Systems, 10(4), 2001, pp. 561–568.
2. A. Selvakumar, and K. Najafi, A high-sensitivity z-axis capacitive silicon
microaccelerometer with a torsional suspension, Journal of Micro-
electromechanical Systems, 7(2), 1998, pp. 192–200.
3. F. P. Beer, and E. R. Johnston, Jr., Vector Mechanics for Engineers—
Dynamics, 6th ed., McGraw-Hill, New York, 1996.
4. O. Degani, D. J. Sater, E. Socher, S. Kaldor, and Y. Nemirowski, Optimal
design and noise generation of micromachined vibrating rate gyroscope
with modulated integrative differential optical sensing, Journal of
Microelectromechanical Systems, 7(3), 1998, pp. 329–338.
5. F. Ayela, and T. Fournier, An experimental study of anharmonic
micromachined silicon resonators, Measurement Science Technology, 9,
1998, pp. 1821–1830.
6. D. A. Harrington, P. Mohanty, and M. L. Roukes, Energy dissipation in
suspended micromechanical resonators at low temperatures, Physica B,
284–288, 2000, pp. 2145–2146.
7. N. Lobontiu and E. Garcia, Mechanics of Microelectromechanical Systems,
Kluwer Academic Press, New York, 2004.

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