Page 289 - Mechanical design of microresonators _ modeling and applications

0-07-145538-8_CH05_288_08/30/05

Resonant Micromechanical Systems

288 Chapter Five

supporting hinges

anchor

seismic mass
seismic mass

microbeam resonator
Figure 5.64 Resonator beam microaccelerometer with four resonators.

axial force

beam resonator
Figure 5.65 Cantilever beam resonator under the action of an acceleration-generated
axial force.

flexure hinge
seismic mass

acceleration
double-ended
tuning fork
anchor
Figure 5.66 Resonant tuning fork microaccelerometer.

frequencies, respectively. Not shown in Fig. 5.66 is a leverage mecha-
nism used to amplify the small mechanical motion of the seismic mass.
35
Another design has been proposed by Aikele et al. where the
mechanical microresonator is attached transversely to the seismic
mass, as illustrated in Fig. 5.67, and therefore it is in either tension or
compression, depending on the acceleration-generated motion of the
seismic mass.

Downloaded from Digital Engineering Library @ McGraw-Hill (www.digitalengineeringlibrary.com)
Copyright © 2004 The McGraw-Hill Companies. All rights reserved.
Any use is subject to the Terms of Use as given at the website.