Page 136 - Mechanics of Microelectromechanical Systems
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2. Microcantilevers, microhinges, microbridges 123
The linear direct stiffness is eventually found to be of the form:
where:
The formulation given here allows for two end segments of various shapes,
provided they are identical and of double symmetry (as the microhinges
treated in this chapter). The same requirement of double symmetry applies
also to the middle segment, but usually this can be selected as having
constant cross-section. A check has been performed for this model by
assuming that all segments have identical constant rectangular cross-section
