Page 165 - Mechanics of Microelectromechanical Systems
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152                                                         Chapter 3



















         Figure 3.18  Compliance  comparison:  configuration #  1  versus configuration # 3  (R / w >  10
                                    for configuration # 3)




















         Figure 3.19  Compliance comparison: configuration # 2 versus configuration # 3 (R / w > 10
                                      for both designs)






















          Figure 3.20  Compliance  comparison:  configuration #  1  versus configuration # 3  (R / w <  10
                                    for configuration # 3)
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