Page 163 - Mechanics of Microelectromechanical Systems

150 Chapter 3

For a relatively-thick design (R / w < 10), the in-plane compliances are:

As Fig. 3.17 indicates, when the radius of the two circular portions is zero, the
current design transforms into the design configuration # 1, whereas when
configuration # 3 changes into configuration # 2. Checks have been
performed in order to verify whether the corresponding stiffnesses of either
configurations #1 or # 2 are retrieved by using the particular geometric
parameters limits mentioned above. When R 0, Eqs. (3.60) through (3.65)
transform indeed into Eqs. (3.35) through (3.40), respectively, which define