Page 241 - Mechanics of Microelectromechanical Systems
P. 241

228                                                         Chapter 4


         where {D} is  the dielectric displacement  vector and   is  the electrical
         permittivity matrix (the  subscript   indicates that the  matrix is determined
         under constant-stress conditions). The vector {D}  is defined as:





         and the symmetric permittivity matrix is:









         When  premultiplying Eq.  (4.99) by  the  vector        the  following
         equation is  obtained,  which  contains  only  specific  energy (energy  per  unit
         volume) terms:







          where    is the mechanical energy and is formulated as:






          and     is the piezoelectric energy defined as:







          The following  equation can be  obtained  from Eq.  (4.107)  through  left-
          multiplication by







          where the electric energy  is:
   236   237   238   239   240   241   242   243   244   245   246