Page 285 - Mechanics of Microelectromechanical Systems
P. 285
272 Chapter 5
Figure 5.7 Two-spring connection: (a) Parallel; (b) Serial
3.1 Flexure-Spring Microdevices
The model of a MEMS comprising a mass physically supported by two
suspensions that enable linear motion about an out-of-the-plane axis z, is
sketched in Fig. 5.8 (a).
Figure 5.8 MEMS with two flexure springs in parallel: (a) Configuration; (b)
Equivalent spring model
The device of Fig. 5.8 (a) can be used as an electrical switch or a
microaccelerometer for instance. The middle link (shuttle mass for
microaccelerometers) will displace about the z-direction through either
