Page 295 - Mechanics of Microelectromechanical Systems
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282 Chapter 5
central plate and, due to the eccentric nature of these forces, the central plate
will rotate with respect to the hinge longitudinal axis.
Figure 5.16 Model for mass and two suspensions with torsion loading
Figure 5.17 Torsion micromirror. (a) Top view schematic; (b) Detail with rotated plate
When the two torques are in equilibrium, the angle of rotation can be
found by means of Eq. (5.45). Another important aspect is the pull-in
phenomenon, which has been discussed in this chapter and which defines the
