Page 353 - Mechanics of Microelectromechanical Systems
P. 353
340 Chapter 5
Problem 5.10
The plate of the optical chopper in Fig. 5.13 is suspended by means of
four inclined beams. Determine the minimum actuation force which is
needed to displace the plate by a quantity Ignore the plate’s self
weight‚ as well as the suspensions’ stiffness about the z-direction.
Answer:
Problem 5.11
The bimorph in Fig. 5.73 pushes the hinged mirror microplate with a
force such that an amplified out-of-the-plane motion is obtained at the
free tip of the microplate. A strain is induced in the bimorph. The
bimorph is defined by the following geometric and material parameters:
The two
identical torsion microhinges have G = 75 GPa‚ and
Also known are and Find the tip displacement
Figure 5.73 Displacement-amplification microdevice with bimorph actuation and torsion
microhinges (top view)
Answer:
Problem 5.12
Find the bloc force for a sagittal microdevice with curved flexure hinges‚
based on the quarter-model of Fig. 5.74.
Answer:
