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5.Static response of MEMS 341
Figure 5.74 Reduced quarter-model of sagittal microdevice with curved flexure hinges
Problem 5.13
A fixed-free microbar having a length and cross-section area
is used in a yield tensile test‚ which indicates that the axial force
producing fracture of the microspecimen is and that the
corresponding maximum tip displacement is Find the values of
Young’s modulus according to the small- and large-deformation models.
Answer:
Problem 5.14
The slender microbeam of Fig. 5.75 is utilized to generate large
displacements through buckling by means of a thermal actuator. The
microbeam is defined by and E = 165 GPa,
and the actuator by
The axial displacement at the actuator-microbeam junction is
when a temperature increase is applied to the actuator.
Establish if this condition is sufficient to produce buckling of the microbeam.
Figure 5.75 Buckling microdevice with thermal actuation and slender beam
