Page 352 - Mechanics of Microelectromechanical Systems
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5. Static response of MEMS 339
Answer:
B = 918.52 T
Problem 5.8
The microdevice in Fig. 5.71 is used as an angular electrostatic actuator
(as in Fig. 5.17) in an application where a rotation angle of needs to
be achieved. Find the necessary voltage knowing that:
The torsion microhinges are
defined by: and G = 80 GPa.
Figure 5.71 Angular electrostatic actuator with torsion microhinges
Answer:
U= 17.34V
Problem 5.9
The four-beam microaccelerometer in Fig. 5.72 is expected to sense an
acceleration Find the mass that will produce a displacement
of the central mass when the four identical flexure microhinges
are defined by: E = 165 GPa.
Figure 5.72 Microaccelerometer with four flexure microhinges
Answer:
