Page 350 - Mechanics of Microelectromechanical Systems
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5. Static response of MEMS 337
Problem 5.4
The microaccelerometer with two flexure microhinges of Fig. 5.67 uses
double capacitance readout (parallel capacitance). Find the acceleration
knowing that the maximum capacitance variation is and the
voltage generated externally is U = 0.1 V. The microaccelerometer mass is
Also known are
(the capacitive area), as well as the parameters of the flexure microhinges:
E = 155 GPa. (Hint: The total capacitance change is
the sum of the capacitance variations at the two gaps).
Figure 5.67 Microaccelerometer with double capacitance readout
Answer:
Problem 5.5
A microdevice as the one shown in Fig. 5.68 is composed of an
electrostatic longitudinal actuator and two beam suspensions, all connected
by a central shuttle mass. The microactuator has the following defining
parameters: (the number of gaps),
and the parameters of one microbeam are:
E = 160 GPa. Find the longitudinal displacement of the shuttle mass
when a voltage U = 80 V is applied to the electrostatic actuator unit.
Figure 5.68 Microdevice with electrostatic actuation and beam suspensions
Answer:
