Page 346 - Mechanics of Microelectromechanical Systems
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5. Static response of MEMS                                       333
































                Figure 5.63 Microcantilever for AFM reading acted upon by three tip forces




          The von Mises  criterion reduces in the case of the constant cross-section to
          the form given in Eq. (5.191).
             Figure 5.64 shows the variation of the normal bending stresses under the
          action of  and     respectively.



















                    Figure 5.64 Bending-produced stresses over the cross-section

         The bending-produced  stresses are  zero  in the  symmetry  axes‚ and  reach a
         maximum  (either  positive –  corresponding to  tension‚ or  negative –
         corresponding to compression) on the outer fibers. The bending moment
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