Page 8 - Mechanics of Microelectromechanical Systems

TABLE OF CONTENTS

Preface ix

1 STIFFNESS BASICS 1
1 INTRODUCTION 1
2 STIFFNESS DEFINITION 1
3 DEFORMATIONS, STRAINS AND STRESSES 6
4 MEMBERS, LOADS AND BOUNDARY CONDITIONS 14
5 LOAD-DISPLACEMENT CALCULATION METHODS:
CASTIGLIANO’S THEOREMS 21
6 COMPOSITE MEMBERS 43
7 PLATES AND SHELLS 58
Problems 60

2 MICROCANTILEVERS, MICROHINGES,
MICROBRIDGES 65
1 INTRODUCTION 65
2 MICROCANTILEVERS 66
3 MICROHINGES 97
4 COMPOUND MICROCANTILEVERS 103
5 MICROBRIDGES 114
Problems 126

3 MICROSUSPENSIONS 131
1 INTRODUCTION 131
2 MICROSUSPENSIONS FOR LINEAR MOTION 131
3 MICROSUSPENSIONS FOR ROTARY MOTION 170
Problems 179

4 MICROTRANSDUCTION: ACTUATION AND SENSING 183
1 INTRODUCTION 183
2 THERMAL TRANSDUCTION 184
3 ELECTROSTATIC TRANSDUCTION 195
4 ELECTROMAGNETIC/MAGNETIC TRANSDUCTION 212
5 PIEZOELECTRIC (PZT) TRANSDUCTION 223
6 PIEZOMAGNETIC TRANSDUCTION 230
7 SHAPE MEMORY ALLOY (SMA) TRANSDUCTION 232
8 BIMORPH TRANSDUCTION 238
9 MULTIMORPH TRANSDUCTION 249
10 OTHER FORMS OF TRANSDUCTION 256
Problems 257