Page 12 - Mechanics of Microelectromechanical Systems

xi
is offered in this book, and which attempts to be self-contained such that
extended reference to other sources be not an absolute pre-requisite. It is also
hoped that the book will be of interest to a larger segment of readers involved
with MEMS development at different levels of background and
proficiency/skills. The researcher with a non-mechanical background should
find topics in this book that could enrich her/his customary modeling/design
arsenal, while the professional of mechanical formation would hopefully
encounter familiar principles that are applied to microsystem modeling and
design.
Although considerable effort has been spent to ensure that all the
mathematical models and corresponding numerical results are correct, this
book is probably not error-free. In this respect, any suggestion would
gratefully be acknowledged and considered.
The authors would like to thank Dr. Yoonsu Nam of Kangwon
National University, Korea, for his design help with the microdevices that are
illustrated in this book, as well as to Mr. Timothy Reissman of Cornell
University for proof-reading part of the manuscript and for taking the pictures
of the prototype microdevices that have been included in this book.

Ithaca, New York
June 2004