Page 16 - Mechanics of Microelectromechanical Systems
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1. Stiffness basics                                                 3























                      Figure 1.2 Rotary/spiral spring: (a) Load; (b) Deformation



         Again, Eqs. (1.3) and (1.4) show that the rotary compliance is the inverse of
          the rotary  stiffness.  The rotary spring is the  model  for  torsional  bar
          deformations and moment-produced bending slopes (rotations) of beams.
             Both situations presented here, the linear spring under axial load and the
          rotary spring under a torque, define the stiffness as being the  inverse to the
          corresponding compliance.  There is  however  the  case of a beam in  bending
          where a force that is applied at the free end of a fixed-free beam for instance
          produces both  a  linear deformation (the  deflection) and  a  rotary one  (the
          slope), as indicated in Fig. 1.3 (a).














           Figure 1.3 Load and deformations in a beam under the action of a: (a) force; (b) moment

          In this case, the stiffness-based equation is:





          The stiffness   connects the force to its direct effect, the deflection about the
          force’s direction  (the  subscript l indicates  its linear/translatory character).
          The other  stiffness,  which is called cross-stiffness (indicated  by  the
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