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5 STATIC RESPONSE OF MEMS 263
1 INTRODUCTION 263
2 SINGLE-SPRING MEMS 263
3 TWO-SPRING MEMS 271
4 MULTI-SPRING MEMS 285
5 DISPLACEMENT-AMPLIFICATION MICRODEVICES 286
6 LARGE DEFORMATIONS 307
7 BUCKLING 315
8 COMPOUND STRESSES AND YIELDING 330
Problems 335
6 MICROFABRICATION, MATERIALS, PRECISION AND
SCALING 343
1 INTRODUCTION 343
2 MICROFABRICATION 343
3 MATERIALS 363
4 PRECISION ISSUES IN MEMS 365
5 SCALING 381
Problems 390
Index 395
