Page 285 - Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim

MECHANICAL SENSORS 265

Figure 8.32 The MS 6100 capacitive microaccelerometer with associated electronics on a hybrid
package

Table 8.13 Comparison of the specification of some commercially available microaccelerometers
Manufacturer Motorola Bosch Bosch Analog Analog
devices devices
Part no. XMMAS4 SMB050 SMB060 ADXL50JH ADXL250JQC
01G1D
Number of axes 1 1 2 1 2
Full-scale range ±40 g ±35 g ±35 g ±50 g ±1 8
Zero g offset drift 20 g - - 1.5 g 0.3 g
Temp, range (°C) -40 to 105 - - - -40 to 85
DC current (mA) 5 7 12 10 3.5
3 dB bandwidth 400 400 400 1300 1000
(Hz)
Nonlinearity (% 0.5 0.5 0.5 0.2 0.2
FS)
Axis alignment (°) N/A N/A 1 N/A 0.1
Noise density 7.8 - - 6.6 2
(mg/Hz)
Package" 16-pin DIP, 28-pin 28-pin 10-pin 14-pin Cerpak
SIP PLCC PLCC TO– 1 00
Price(€)* 11 N/A N/A 13.6 18.1
a
See Chapter 4 on packeges
b
Unit price for 100 pcs