Page 287 - Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim

MECHANICAL SENSORS 267

Figure 8.33 Early example of a silicon-micromachined coupled resonant gyrometer. From Grieff
et al (1991)

Figure 8.34 Some examples of ring microgyroscopes: (a) University of Michigan, USA and
(b) DERA (UK). From McNie et al. (1998)

Table 8.14 Performance of a polysilicon-
coupled resonant gyroscope; the MARS—RR1
is taken from Geiger et al, (1998)
Parameter Specification

Bias stability 0.018 deg s -1
Noise 0.27 deg/h
-1
Sensitivity 10 mV/(deg s )
Linearity <0.2%
Supply voltage 15 V
Current (discrete 20 mA
electronics)
Shock survival 1000 g