Page 320 - Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim

300 MICROSENSORS

8.7 CONCLUDING REMARKS

In this chapter, we have presented an overview of some of the different types of microsen-
sors in the literature, such as mechanical, magnetic, and chemical. Most of these devices
are fabricated using silicon technology with the addition of either bulk or surface micro-
machining techniques. However, there are three other important classes of microsensors,
and these are discussed elsewhere in the book. First, IDT microsensors, based on acoustic
materials, are described in Chapter 13 and offer the attractive possibility of remote wireless
communication. Second, IDT-based MEMS sensors can be found in Chapter 14, which
describes the use of non-silicon-based micromechanical structures with IDTs. Finally,
Chapter 15 explores the expanding field of smart and intelligent devices that will become
commonplace in the next few years.

REFERENCES

Al-Khalifa, S. (2000). Identification of a binary gas mixture from a single resistive microsensor,
Ph.D. Thesis (Advisor J.W. Gardner), University of Warwick, Coventry, UK.
Al-Khalifa, S., Gardner, J. W. and Craine, J. F. (1997). "Characterisation of a thermal wave
microsensor for the intelligent analysis of atmospheric gases," in A. T. Augousti and
N. M. White, eds., Sensors and their Applications, 8 th ed., lop Publishing, Bristol, pp. 89-94.
Attard, G. S. et al., (1997). "Mesoporous platinum films from lyotropic liquid crystalline phases,"
Science, 278, 838-840.
Avram, M., Neagoe, O. and Simion, M. (1998). "An optimised integrated bipolar magnetotran-
sistor," Eurosensors XII, Vol. 2, IOP Publishing, Bristol, pp. 991-994.
Ayazi, F. and Najifi, K. (1998). Design and fabrication of high-performance polysilicon vibrating
ring gyroscope, Proc. of the 11th Int. Workshop on MEMS, Heidelberg, January, pp. 621-626.
Bao, X. Q., Varadan, V. V. and Varadan, V. K. (1994). "Wireless surface acoustic wave temperature
sensor," J. Wave-Material Interact., 19-27.
Baltes, H. and Brand, O. (2000). CMOS-based microsensors, Proceedings of Eurosensors XIV,
Copenhagen, Denmark, August 27-30, pp. 1-8.
Bellekom, S. (1998). "CMOS versus bipolar Hall plates regarding offset correction," Eurosensors
XII, Vol. 2, IOP Publishing, Bristol, pp. 999-1002.
Boside, G. and Harmer, A. (1996). Chemical and Biochemical Sensing with Optical Fibers and
Waveguides, Artech House, Boston.
Briand, D. et al., (2000). New response patterns for MOSFET gas sensors using low power devices,
Proceedings of Eurosensors XIV, Copenhagen, Denmark, August, 27-30, pp. 737-740.
Cass, A. E. G., ed. (1990). Biosensors: A Practical Approach, Oxford University Press, Oxford.
Corcoran, P., Shurmer, H. V. and Gardner, J. W. (1993). "Integrated tin oxide sensors of low power
consumption for use in gas and odour sensing," Sensors and Actuators B, 15-16, 32-37.
Covington, J. A. et al. (2000). "Array of MOSFET devices with electrodeposited conducting
polymer gates for vapour and odour sensing," Proc. of the 7th Int. Symp on Olfaction and
Electronic Noses, Brighton, July, pp. 20-24.
Demarne, V. and Grisel, A. (1988). "An integrated low power thin film CO gas sensor on silicon,"
Sensors and Actuators, 13, 301-313.
Fatikow, S. and Rembold, U. (1997). Microsystem Technology and Microrobots, Springer, Berlin,
p. 408.
Gall, M. (1991). "The Si planar pellistor: a low power pellistor sensor in Si think film technology,"
Sensors and Actuators B, 4, 533-538.