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Integrated Pyr oelectric Sensors     135




                      70

                      60
                     Dielectric constant  50



                       40

                       30

                       20
                                                                 100 k
                       20                                    10 k
                            40
                                 60                     1 k
                                      80                 Frequency (Hz)
                                           100      100
                             Temperature (°C)
               FIGURE 4.9  Temperature- and frequency-dependent dielectric spectroscopy of
               a P(VDF-TrFE) layer with a PVDF content of 55%. The phase transformation
               occurs at all frequencies at T = 65°C.
                                     C

               transitions. In the phase diagram derived by Furukawa (Fig. 4.8c), the
               phase transitions are plotted as a function of the VDF content. It is
               obvious that the transition temperatures decrease with the amount of
               PTrFE added, especially upon heating. The uppermost two parallel
               lines in this diagram correspond to the melting points upon heating
               and cooling of the material. For very high contents of PVDF, the Curie
               temperature is above the melting point, implying that the material is
               always ferroelectric in the solid state (assuming that the material is in
               the all-trans conformation).
                   Here again the values for phase transition temperatures of the sol-
               gel-based ferroelectric copolymer samples (Fig. 4.8c) nicely correspond
               to Furukawa’s data. Therefore it can be concluded that the sol-gel proc-
               essed P(VDF-TrFE) thin films are excellent ferroelectrics and therefore
               good candidates for materials with high pyroelectric activity.

               4.2.4  Description of the Sensor Part

               Setup for the Measurement of the Pyroelectric Response
               To measure the macroscopic pyroelectric response of the sensor element,
               a laser diode (80 mW, 808 nm) is intensity-modulated with a sine or a
               square wave and is placed to illuminate the sample at the surface of the
               top electrode. The electrode is coated with a black graphite absorber to
               achieve maximal absorption. The induced temperature variations in
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