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Integrated Pyr oelectric Sensors     139




                                   9
                     100   Z MBPA  = 10 Ω
                    Voltage sensitivity (V/W)  10 1  Laser code  PVDF-sensor  Z LI  = 10 Ω  4.0 μm

                                             8


                                             Lock-in
                                             amplifier
                          Waveform
                          generator
                     0.1
                                    Computer
                    0.01
                               MBPA               V ~ 1/ω
                               Lock in
                    1E–3
                         0.01   0.1     1     10    100    1000  10000
                                          Frequency (Hz)

                                                 at 0.1 Hz with MBPA
                                  Voltage output V sense
                          15.0
                          10.0
                        V Sensor (V)  –5.0
                           5.0
                           0.0


                         –10.0
                         –15.0
                              0   10  20   30   40  50   60   70  80
                                              Time (s)
               FIGURE 4.12  Top: Voltage sensitivity of a 25 μm thick capacitive PVDF foil
               sensor with Ag top and bottom contacts and a graphite absorbing layer on
               top. The pyroelectric response of the foil sensor was measured in the low-
               frequency range by a high-impedance parameter analyzer (MBPA) and at
               medium and higher frequencies by a lock-in amplifi er. The inserts show an
               AFM micrograph of the phase signal of an Ag electrode on top of the PVDF foil
               and the equivalent circuit diagram of the measuring setup. Bottom: Voltage
               output of the PVDF sensor measured with the MBPA at a modulation
               frequency of 0.1 Hz.
                   For comparison, the voltage sensitivity and output voltage of a
               2 μm thick spin-on PVDF-copolymer film are depicted in Fig. 4.13.
               The ferroelectric copolymer films are fabricated and characterized as
               described in Sec. 4.2.4 and afterward subdued to a stepwise poling
               procedure (see Sec. Setup for the Measurement of the Pyroelectric
               Response). Due to the much higher film capacitance (~ 600 pF) com-
               pared to the foil, the cutoff frequencies are expected to be one order of
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