Page 150 - An Introduction to Microelectromechanical Systems Engineering

Summary 129

Silicon nitride
Silicon dioxide

Pattern oxide Etch grooves;
and nitride strip nitride

Silicon nitride
p+ Si

Pattern front side Etch grooves; Etch from back side;
nitride pattern back side stop on p+;
nitride strip nitride
Silicon nitride p+ Si Silicon nitride

Pattern nitride; Protect front side; RIE p+ Si;
etch shallow pattern back side; strip nitride
grooves etch cavities;
stop on p+.
Figure 4.38 Fabrication process for an electrostatically actuated micropump.

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