Page 152 - An Introduction to Microelectromechanical Systems Engineering

Summary 131

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[43] U.S. Patent 6,533,366, March 18, 2003.
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Selected Bibliography

Frank, R., Understanding Smart Sensors, Norwood, MA: Artech House, 1996.
Gad-El-Hak, M., The MEMS Handbook, Boca Raton, FL: CRC Press, 2001.
Kovacs, G. T. A., Micromachined Transducers Sourcebook, New York, NY: McGraw-Hill,
1998.
Micromechanics and MEMS: Classic and Seminal Papers to 1990, W. Trimmer (ed.), New
York: IEEE, 1997.
Senturia, S. D., Microsystem Design, Boston, MA: Kluwer Academic Publishers, 2000.
Soloman, S., Sensors Handbook, New York: McGraw-Hill, 1998.
Wise, K. D. (ed.) “Special Issue on Integrated Sensors, Microactuators, and Microsystems
(MEMS),” Proceeding of the IEEE, Vol. 86, No. 8, August 1998.