Page 292 - An Introduction to Microelectromechanical Systems Engineering

About the Authors

Nadim Maluf received a B.E. from the American University of Beirut, Lebanon, an
M.S. from the California Institute of Technology, and a Ph.D. from Stanford
University, all in electrical engineering.
He is currently vice president of marketing at New Focus, a division of
Bookham Technology, in San Jose, California. Prior to his current position, he held
senior management positions at New Focus and was the head of the R&D depart-
ment at NovaSensor in Fremont, California. He is also a consulting professor of
electrical engineering at Stanford University. He has more than 20 years of industry
experience in integrated circuit technology, microelectromechanical systems, sen-
sors and actuators, and their use in medical, automotive, industrial, and telecommu-
nications applications.

Kirt Williams is a senior scientist at Science Applications International Corpora-
tions. He has conducted research and development on a variety of micromachined
devices, including all-silicon plate valves for high pressure and a wide temperature
range, high-Q variable capacitors, optical switches, and thermionic-emission-based
ionization pressure sensors and magnetic-field sensors. He is also a short course lec-
turer on MEMS for the University of California Extension. He received a B.S. with a
double major of electrical engineering and materials science and an M.S. and a
Ph.D. in electrical engineering, all from the University of California at Berkeley. He
is a state-licensed professional engineer in electrical engineering. Dr. Williams has
authored or coauthored a number of papers, patents, and a book chapter on microe-
lectromechanical devices and fabrication processes.

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