Page 296 - An Introduction to Microelectromechanical Systems Engineering

Index 275

material properties temperature Distributed-feedback lasers.
dependence, 19 See DFB tunable laser
yield strength, 16 DNA
Curie temperature, 27 addressing with microelectrodes, 183–85
amplification, 174
D analysis, 172–81
building blocks, 172
Daimler Benz angular-rate sensor, 110–12
defined, 110 capture probes, 183, 184
fabrication steps, 111 complementarity, 174
electrophoresis on a chip, 176–80
illustrated, 111
hybridization arrays, 180–81
See also Angular-rate sensors
Damping, 200 nucleotides, 172
Deep reactive ion etching (DRIE), 51, 52–55, PCR on a chip, 174–76
polymerase chain reaction (PCR), 173, 174
252
sequencing, 176, 179–80
ARDE in, 53
defined, 52 structure, 173
etch-rate dependence, 54 Double-sided lithography, 43
DRIE accelerometers, 103–7
process characteristics, 52
angular-rate sensors, 103–7
silicon fusion bonding with (SFB-DRIE), 71,
72 defined, 103
of SOI wafers, 71–72, 73 gyroscopes, 104–7
scanning-electron micrograph, 103
STS tools, 54
trench profile, 53
use of, 55 E
See also Etching EDP etching, 48
Delamination, 252–53 EFAB, 62–63
Delphi Delco angular-rate sensor, 107–9 defined, 62
Deoxyribonucleic acid. See DNA example, 63
DFB tunable laser, 148–51 process, 62–63
defined, 148 process illustration, 63
fabrication process, 151 Electrical failures, 253–54
micromirror, 150 Electrical interconnects, 227–30
resonant cavity, 149 flip-chip bonding, 229–30
schematic, 149 wire bonding, 227–29
schematic cross section, 150 See also Interconnects
See also Tunable lasers Electrodischarge machining (EDM), 65
Diamond, 22 Electromagnetic interference (EMI), 220
Die-attach processes, 225–27 Electromechanical etching, 50–51
Digital Light Processing (DLP), 133, 135 defined, 50
Digital Mirror Device (DMD), 70, 133, illustrated, 50
135–39 See also Etching
defined, 136 Electroosmotic flow, 171
environmental tests, 255 Electrophoresis
fabrication, 137, 138, 219 on a chip, 176–80
illustrated, 136 capillary, 177
micromirror, 255 defined, 176
optical beam steering, 137 employing, 178
package, 223 fluid injection, 179
reliability, 139 gel, 177
reliability case study, 254–56 illustrated, 177
structures, 137 See also DNA
Digital M × N optical switch, 154–56 Electrophoretic flow, 171