Page 297 - An Introduction to Microelectromechanical Systems Engineering

276 Index

Electroplating, 58–59 modes, 249–54
defined, 58 stiction, 253
example solutions, 59 thermal, 254
Electrostatic actuation, 82–84 See also Reliability
defined, 82–83 Fiber-optic communication devices, 141–65
extension, 83–84 beam-steering micromirror, 156–61
illustrated, 83 digital M × N optical switch, 154–56
See also Actuation tunable lasers, 142–51
Epitaxy, 34–35 variable optical attenuator (VOA), 161–65
defined, 34 wavelength locker, 151–54
use of, 35 Film bulk acoustic resonators (FBARs),
Etchants 208–11
anisotropic, 46 cross section, 109
isotropic, 45 fabrication process, 210
orientation-dependent (ODEs), 46 filters, 209, 210
Etching, 44–55 impedance vs. frequency, 209
anisotropic wet, 46–50 parallel, 209
aspect-ratio-dependent (ARDE), 53 series-resonant frequency, 208
deep, 44 See also Resonators
deep reactive ion (DRIE), 51, 52–55 Flip-chip bonding, 229–30
EDP, 48 advantages, 229–30
electromechanical, 50–51 defined, 229
isotropic wet, 45 illustrated, 230
objective, 44 See also Electrical interconnects
thin films, 44 Fluid nozzles, 85–88
timed, 100 Footing, 54
Evaporation, 36–37 FORTURAN, 62
defined, 36 Fractures, 251–52
as directional deposition process, 37 Free spectral range (FSR), 151
performing, 36 Fused quartz, 21
External cavity tunable laser, 144–48
comb actuator, 146, 147 G
defined, 144–45
Gallium arsenide (GaAs), 22
designs, 146 Gel electrophoresis, 177
fabrication, 147 GeneChip, 180–82
fixed grating, 145 Glass, 21
flexural springs, 147
micromachining, 21
illustrated, 145 transition temperature, 23
packaging, 148 Grating Light Valve (GLV), 139–41
See also Tunable lasers
advantages, 141
defined, 139
F fabrication, 141
Failure in time (FIT), 247 implementation, 140
Failure mode and effect analysis (FMEA), 249 operating principle illustration, 139
Failure(s) support, 140
cracks and fractures, 251–52 GR-CORE series, 245
defined, 246 Grinding, 57–58
delamination, 252–53 Group III-V compound semiconductors, 22–23
electrical, 253–54 Gyroscopes, 104–7
mean time between (MTBF), 247 illustrated, 104
mean time to (MTTF), 247 precision, 104