Page 304 - An Introduction to Microelectromechanical Systems Engineering

Recent Titles in the Artech House
Microelectromechanical Systems (MEMS) Series

Fundamentals and Applications of Microfluidics, Nam-Trung Nguyen
and Steven T. Wereley
Introduction to Microelectromechanical (MEM) Microwave Systems,
Héctor J. De Los Santos
An Introduction to Microelectromechanical Systems Engineering, Second Edition,
Nadim Maluf and Kirt Williams
MEMS Mechanical Sensors, Stephen Beeby et al.

RF MEMS Circuit Design for Wireless Communications, Héctor J. De Los Santos

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