Page 52 - An Introduction to Microelectromechanical Systems Engineering

Summary 31

Summary

The selection of substrate materials for MEMS is very broad, but crystalline silicon
is by far the most common choice. Complementing silicon is a host of materials that
can be deposited as thin films. These include polysilicon, amorphous silicon, silicon
oxides and nitrides, glasses, organic polymers, and a host of metals. Crystallo-
graphic planes play an important role in the design and fabrication of silicon-based
MEMS and affect some material properties of silicon. Three physical effects com-
monly used in the operation of micromachined sensors and actuators were intro-
duced: piezoresistivity, piezoelectricity, and thermoelectricity.

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