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Osiander / MEMS and microstructures in Aerospace applications DK3181_c003 Final Proof page 39
LIGA
Mold
3D structures formed
followed by injection
by mold fabrication,
Laboratories.)
National
Micromachining
Dry Etch Patterns
Sandia
Bulk MEMS Fabrication molding or electroplating. Silicon Substrate Nozzle Membrane . p ++ (B) Wet Etch Patterns Silicon Substrate Holes Channels 1.9.2005 8:59pm 39
3D structures formed
etching of silicon
(Courtesy:
by wet or dry
substrate.
Groove
[100] [111] 54.7 categories.
technology
Surface Micromachining Silicon Substrate fabrication MEMS

Structures formed by deposition and etching of sacrificial and structural thin films. Poly Si 3.1 FIGURE © 2006 by Taylor & Francis Group, LLC