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MEMS Fabrication 1.9.2005 8:59pm 39
LIGA Mold
3D structures formed by mold fabrication, followed by injection molding or electroplating. .
Silicon Substrate Silicon Substrate Laboratories.)
Bulk Micromachining Membrane p ++ (B) Wet Etch Patterns Holes Dry Etch Patterns National Sandia
3D structures formed by wet or dry etching of silicon substrate. Nozzle [111] Channels (Courtesy:
Groove
[100] 54.7 categories.
technology
Surface Micromachining Silicon Substrate fabrication MEMS
Structures formed by deposition and etching of sacrificial and structural thin films. Poly Si 3.1 FIGURE © 2006 by Taylor & Francis Group, LLC
