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4-72 MEMS: Design and Fabrication
UV light
UV mask
Resist
Cu layer
PMMA
AI
(a) (d)
Electrodeposit
Au
(b) (e)
X-ray
(c) (f)
(a)
Plastic injection
Stainless
2cm
steel
LIGA capillary
2mm
LIGA die
(b)
FIGURE 4.53 (a) Schematic diagram of the modified LIGA process (dimensions not to scale). (b) Duplication process
of LIGA spinneret. (Based with permission on Cheng, Y. [2000] “Professional Activity Report in Micromachining,
1994–2000” Synchrotron Radiation Research Center, Hicnchu, Japan.)
© 2006 by Taylor & Francis Group, LLC
