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4-74 MEMS: Design and Fabrication

connectors were developed at IMM [Editorial, 1994]. In line with the micromanufacturing philosophy
presented in this book (i.e., to optimize the use of each micromachining technique for optimal cost/per-
formance application), those parts of the mold insert that do not require such high accuracy are fabri-
cated using other methods of precision machining such as EDM.

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