Page 189 - Materials Science and Engineering An Introduction
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Summary   •  161


              Silicon            Temperature dependence                      Diffusion in semiconductors
              Semiconductors       of diffusion coefficient                      (impurity doping)
              (Processing)             (Chapter 5)                               (Chapters 5 & 18)

                                                                        Concentration of diffusing species (C)  After predeposition
                                                Q d
                                    D = D 0   expa -  b                   C
                                                RT                         s




                                                                                      After drive-in

                                                                         C
                                                                          B
                                                                                             x j
                                                                                   Distance into silicon (x)




                                                                     800
                                                                               A
                                                                     700
                                                                           A
                                                                                  A
                                                                     600         +       P
                                                                                P
                                                                     500
                                                                    Temperature (°C)  400  A  +  B  B




                                                                     300      A
                                                                            M(start)
                                                                     200                      50%
                                                                            M(50%)   M + A
                                                                            M(90%)
                                                                     100

                                                                       0
                                                                       10 –1  1   10   10 2  10 3  10 4  10 5
                                                                                      Time (s)
                                                                   Isothermal transformation
                                                                     diagrams
                                                                     (Chapter 10)
              Iron–Carbon        Temperature dependence
              Alloys (Steels)      of diffusion coefficient
              (Processing)         (Chapter 5)
                                                                   Tempering (tempered
                                                                     martensite)
                                             Q d
                                 D = D 0   expa -  b                 (Chapter 10)
                                             RT
                                                                      martensite (BCT, single phase) →
                                                                    tempered martensite (a   Fe 3 C phases)
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