Page 105 - Mechanical design of microresonators _ modeling and applications

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Basic Members: Lumped- and Distributed-Parameter Modeling and Design

104 Chapter Two
Similarly, the first resonant frequency of a circular membrane of radius
R and thickness t is
2.404 s
Ȧ = (2.219)
R ȡt

References

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Boca Raton, Fla., 2002.
3. N. Lobontiu and E. Garcia, Mechanics of Microelectromechanical Systems,
Kluwer Academic Press, New York, 2004.
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corner-filleted flexure hinges, Review of Scientific Instruments, 75(11), 2004,
pp. 4896—4905.
5. S. Timoshenko, Vibration Problems in Engineering, D. Van Nostrand
Company, New York, 1928.
6. W. T. Thomson, Theory of Vibration with Applications, 2nd ed., Prentice-
Hall, Englewood Cliffs, N.J., 1981.
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8. F. P. Beer, and E. R. Johnston, Jr., Vector Mechanics for Engineers–
Dynamics, McGraw-Hill, Boston, 1997.
9. F. Ayazi and K. Najafi, A HARPSS polysilicon vibrating ring gyroscope,
Journal of Microelectromechanical Systems, 10(2), 2001, pp. 169—179.

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