Page 107 - Mechanical design of microresonators _ modeling and applications

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Microhinges and Microcantilevers: Lumped-Parameter Modeling and Design

106 Chapter Three
hinge

anchor
mass

Substrate

Figure 3.1 Microhinge with suspended mass.

cantilever
anchor

substrate

Figure 3.2 Suspended microcantilever.

Microcantilevers are physically fixed-free members, as shown in
Fig. 3.2. The microcantilevers are employed in atomic force micros-
copy (AFM) for sub-Angstrom resolution reading and writing, as well
as in micro- and nanotransduction applications such as detection of
very small amounts of deposited substances. Other microcantilever
applications are implemented in material property probing, cellular
engineering, surface imaging, and metrology. The microcantilever can
be actuated and monitored in the quasi-static regime or in the modal
one by experimentally measuring the deflection or the slope (in the
quasi-static regime) or the relevant resonant frequency (either the
bending or the torsional ones). Examples of using microcantilevers for
mass deposition purposes include the works of, to cite just a few,
8
6
7
Raitieri et al.; Ilic et al.; Sato et al.; Ilic, Yang, and Craighead; 9
11
Zalatudinov et al.; 10 or Britton et al. . Atomic force microscopy
applications have been studied, among many others, by King et al.; 12
14
13
Peterson et al.; Morita, Wiesendanger, and Meyer; van de Water and
15
16
Molenaar; and Ried et al. . Other microcantilever geometries that
are based on adding and subtracting circular and elliptical areas to and
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