Page 18 - Mechanical design of microresonators _ modeling and applications

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Design at Resonance of Mechanical Microsystems

Design at Resonance of Mechanical Microsystems 17

0.3
0.00001
Q / Q c,u
0
1 ×10 -6
y 0
z 0 1 × 10 -6
0.00001
Figure 1.14 Quality factor contribution by the Couette flow underneath the movable
plate.

0.2 0.00001
Q / Q c,s
0
1 ×10 -6 y 0

z 0 1 × 10 -6
0.00001
Figure 1.15 Quality factor contribution by the Couette flow on the side area.

0.3
Q / Q s,a 0.00001
0.1
1 ×10 -6 y 0

z 0 1 × 10 -6
0.00001
Figure 1.16 Quality factor contribution by the Stokes flow above the movable plate.

Internal (material) dissipation mechanisms. Besides losses in a mechan-
ical microsystem that are produced through fluid-structure interaction
and are of a viscous-damping nature, and other similar losses that are
caused by friction between structures in relative motion (and that are
not detailed here), another source of energy losses is represented by the
internal dissipation mechanisms. These mechanisms, also referred to

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