Page 21 - Mechanical design of microresonators _ modeling and applications
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Design at Resonance of Mechanical Microsystems
20 Chapter One
1.5×10 6
0.0002
QTED
10000
1×10 - 7 1 [m]
t [m]
0.00001 0.0001
Figure 1.19 TED quality factor in terms of cantilever thickness and length.
6
9.5× 10
9× 10 6
QTED 6
8.5× 10
8× 10 6
7.5× 10 6
280 300 320 340
T [K]
Figure 1.20 TED quality factor in terms of temperature for a silicon nitride
nanocantilever 100 nm thick and 60 m thick.
1.4× 10 6
1.2× 10 6
1× 10 6
800000
Qcl
600000
400000
200000
0
0 0.02 0.04 0.06 0.08 0.1
t / 1
Figure 1.21 Quality factor related to clamping losses as a function of the thickness-to-
length ratio.
where l is the length and t is the thickness of a cantilever beam. Figure 1.21
is the two-dimensional plot illustrating this loss mechanism.
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