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                                            Design at Resonance of Mechanical Microsystems

                              28   Chapter One

                                                                 T
                                            T
                                        {X } M {X }= 0        {X } K {X }= 0             (1.89)
                                                                        j
                                                                i
                                                   j
                                           i
                              for i 실 j. When i = j, the generalized stiffness and mass matrices can be
                              defined as
                                                 T
                                                                    T
                                         M ={X } M {X }      K ={X } K {X }              (1.90)
                                           i
                                                        i
                                                              i
                                                i
                                                                           i
                                                                   i
                              The generalized mass and stiffness matrices of Eqs. (1.90) can be uti-
                              lized to quantify the participation of various modes in defining the free
                              vibrations of a multiple-DOF system as the superposition of normal
                              modes in the form:
                                                     {X}=෸ c {X }                        (1.91)
                                                            i
                                                               i
                                                          i
                              where c i  is a participation factor corresponding to the ith mode. Pre-
                                                               T
                              multiplication in Eq. (1.91) by {X } [M] gives the mass participation
                                                              i
                              factor as
                                                       {X } T  M {X}
                                                         i
                                                  c i M  =                               (1.92)
                                                            M
                                                              i
                              Similarly, the stiffness participation factor is
                                                       {X } T  K {X}
                                                         i
                                                  c K  =                                 (1.93)
                                                   i        K
                                                             i
                                                               2
                                It can be shown — see Thomson,  for instance — that by using the
                              modal matrix, defined as
                                              P = {X }{X }. . .{X }. . .{X }             (1.94)
                                                                      n
                                                     1
                                                         2
                                                                i
                              where {X i } is the  ith eigenvector, the equation  of motion can be
                              decoupled, as it can be written in the form:
                                                      ..
                                                 M m  {x}+ K m  {x}={0}                  (1.95)
                              where the transformed (modal) mass and stiffness matrices
                                                  T                   T
                                         M m  = P   M P      K m  = P   K P              (1.96)
                              are both of diagonal form.
                                For an n-DOF dynamic system, the mass matrix [M] and the stiffness
                              matrix [K] are symmetric and generally fully populated. Such a system
                              is also known as fully coupled. Systems where the mass matrix is in




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