Page 337 - Mechanical design of microresonators _ modeling and applications
P. 337

0-07-145538-8_CH06_336_08/30/05



                                         Microcantilever and Microbridge Systems for Mass Detection

                              336   Chapter Six

                              11. B. Ilic, D. Czaplewski, M. Zalatudinov, and H. G. Craighead, Single cell
                                 detection with micromechanical  oscillators,  Journal of  Vacuum Science
                                 Technology, 19(6), 2001, pp. 2825–2828.
                              12. L. Sekaric, J. M. Parpia, H. G. Craighead, T. Feygelson, B. H. Houston, and
                                 J. E. Butler, Nanomechanical resonant  structures in  nanocrystalline
                                 diamond, Applied Physics Letters, 81(23), 2002, pp. 4455–4456.
                              13. L. Sekaric, M. Zalatudinov, R. B. Bhiladvala, A. T. Zehnder, J. M. Parpia,
                                 and H. G. Craighead, Operation of nanomechanical resonant structures in
                                 air, Applied Physics Letters, 81(14), 2002, pp. 2641–2643.
                              14. N. V. Lavrik and P. G. Datskos,  Femtogram mass  detection using
                                 photothermally  actuated nanomechanical resonators,  Applied Physics
                                 Letters, 82(16), 2003, pp. 2697–2699.
                              15. B.  Ilic,  Y. Yang, and  H.  G.  Craighead, Virus detection using micro-
                                 electromechanical devices,  Applied Physics Letters, 85(13), 2004,  pp.
                                 2604–2606.
                              16. B. Ilic, H. G. Craighead, S. Krylov, W. Senaratne, C. Ober, and P. Neuzil,
                                 Attogram detection using nanoelectromechanical devices,  Journal of
                                 Applied Physics, 95(7), 2004, pp. 3694–3703.
                              17. S. Evoy, A. Olkhovets, L. Sekaric, J. M. Parpia, H. G. Craighead, and D. W.
                                 Carr, Time-dependent internal friction in  silicon  nanoelectromechanical
                                 systems, Applied Physics Letters, 77(15), 2000, pp. 2397–2399.
                              18. K.  Y. Yasumara, T. D.  Stowe, E.  M. Chow,  T. Pfafman,  T.  W.  Kenny,
                                 B. C. Stipe, and D. Rugar, Quality factors in micron- and submicron-thick
                                 cantilevers,  Journal of Microelectromechanical Systems, 9(1), 2000,  pp.
                                 117–125.
                              19. J. Yang, T. Ono, and M.  Esashi, Mechanical  behavior of ultrathin
                                 microcantilever, Sensors and Actuators, 82, 2000, pp. 102–106.
                              20. J. Tamayo, A. D. L. Humphris, A. M. Malloy, and M. J. Miles, Chemical
                                 sensors and biosensors in liquid environment based on microcantilevers
                                 with amplified quality factor, Ultramicroscopy, 86, 2001, pp. 167–173.
                              21. N. Lobontiu  and E.  Garcia,  Mechanics of Microelectromechanical  Sys-
                                 tems, Kluwer Academic Press, New York, 2004.





















                           Downloaded from Digital Engineering Library @ McGraw-Hill (www.digitalengineeringlibrary.com)
                                      Copyright © 2004 The McGraw-Hill Companies. All rights reserved.
                                        Any use is subject to the Terms of Use as given at the website.
   332   333   334   335   336   337