Page 336 - Mechanical design of microresonators _ modeling and applications
P. 336
0-07-145538-8_CH06_335_08/30/05
Microcantilever and Microbridge Systems for Mass Detection
Microcantilever and Microbridge Systems for Mass Detection 335
for relatively thinner and narrower end segments, the mass prediction
by the full model can be 1.2 times larger than the result yielded by the
simplified model. For thicker and wider end segments, the relationship
reverses and the mass predicted by the full model is approximately
0.6 times the mass obtained through the simplified model.
References
1. R. Raiteri, M. Grattarola, H.-J. Butt, and P. Skladal, Micromechanical
cantilever-based biosensors, Sensors and Actuators B, 79, 2001, pp.
115–126.
2. C. L. Britton, R. L. Jones, P. I. Oden, Z. Hu, R. J. Warmack, S. F. Smith,
W. L. Bryan, and J. M. Rochelle, Multiple-input microcantilever sensors,
Ultramicroscopy, 82, 2000, pp. 17–21.
3. D. R. Baselt, B. Fruhberger, E. Klaassen, S. Cemalovic, C. L. Britton, S. V.
Patel, T. E. Mlsna, D. McCorkle, and B. Warmack, Design and performance
of microcantilever-based hydrogen sensor, Sensors and Actuators B, 88,
2003, pp. 120–131.
4. I. Dufour and L. Fadel, Resonant microcantilever type chemical sensors:
analytical modeling in view of optimization, Sensors and Actuators B, 91,
2003, pp. 353–361.
5. E. Garcia, N. Lobontiu, Y. Nam, B. Ilic, and T. Reissman, Shape
optimization of microcantilevers for mass variation detection and AFM
applications, SPIE04 International Conference, vol. 5390, 2004, pp.
421–427.
6. K. B. Brown, W. Allegretto, F. E. Vermeulen, R. P. W. Lawson, and
A. M. Robinson, Cantilever-in-cantilever micromachined pressure sensors
fabricated in CMOS technology, 1999 IEEE Canadian Conference on
Electrical and Computer Engineering, 1999, pp. 1686–1691.
7. H. Kawakatsu, H. Toshiyoshi, D. Saya, and H. Fujita, A silicon based
nanometric oscillator for scanning probe microscopy operating in the 100
MHz range, Japanese Journal of Applied Physics, 38, 1999, pp.
3962–3965.
8. B. Rogers, L. Manning, M. Jones, T. Sulchek, K. Muray, B. Beneschott, J.
D. Adams, Z. Hu, T. Thundat, H. Cavazos, and S. C. Minne, Mercury vapor
detection with a self-sensing, resonating piezoelectric cantilever, Review of
Scientific Instruments, 74(11), 2003, pp. 4899–4901.
9. L. Pinnaduwage, V. Boiadjiev, J. E. Hawk, and T. Thundat, Sensitive
detection of plastic explosives with self-assembled monolayer-coated
microcantilevers, Applied Physics Letters, 83(7), 2003, pp. 1471–1473.
10. B. Ilic, D. Czaplewski, H. G. Craighead, P. Neuzil, C. Campagnolo, and C.
Batt, Mechanical resonant immunospecific biological detector, Applied
Physics Letters, 77(3), 2000, pp. 449–451.
Downloaded from Digital Engineering Library @ McGraw-Hill (www.digitalengineeringlibrary.com)
Copyright © 2004 The McGraw-Hill Companies. All rights reserved.
Any use is subject to the Terms of Use as given at the website.