Page 130 - Mechanics of Microelectromechanical Systems
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2. Microcantilevers, microhinges, microbridges 117
By using the following variable change (as indicated in Fig. 2.36):
it is possible to express the integrals taken between 0 and l/2 in Eqs. (2.172)
as:
where the superscript 1 indicates the first (1-2) symmetric part of the
microbridge of Fig. 2.36. All the compliances in Eqs. (2.174), (2.175) and
(2.176) are calculated at point 2 (assumed free) with respect to the fixed
point 1. Such compliances have been provided for various microhinge
configurations in this chapter.
The integrals that are taken between the limits of l/2 and l in Eqs. (2.172)
can be expressed in a more convenient manner by using the following change
of variable:
