Page 184 - Mechanics of Microelectromechanical Systems
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3. Microsuspensions                                               171
         the action  of an external  torque   that is applied  to the outer  shaft,  for
         instance (case  where  the inner  hub is  supposed to be  fixed), the  relative
         rotation angle is expressed by the equation:





         The torsion stiffness is:





         where  n  is the number  of beams  and    is the rotation  stiffness of the
         curved beam shown in Fig. 3.41  and which is defined by a radius R, a center
         angle and a constant rectangular cross-section.
















                      Figure 3.41 Curved spring with defining planar geometry

          This stiffness can be determined by utilizing the compliance formulation that
          has been  introduced in Chapter  1  for a relatively-thin  curved beam.  It has
          been shown there that the in-plane deformation of a curved beam  is defined
          by a set of six compliances, which have explicitly been derived, and arranged
          into a compliance matrix – Eq. (1.127). It is known that the inverse of the
          compliance  matrix is the  related stiffness  matrix, and  therefore Eq.  (3.26)
          also applies to this case.  Through inversion of the compliance matrix of the
          right-hand side in Eq.  (3.26) and  by  using the corresponding  individual
          compliance Eqs. (1.156) to (1.161), it is found that:









              Of interest is also the suspension capacity of the curved spring set as the
          self-weight of the supported member (the outer hollow shaft in this case) can
          displace it  downward  about the  z-axis.  The  corresponding  linear  stiffness
          about the z-axis can be calculated as:
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