Page 201 - Mechanics of Microelectromechanical Systems

188 Chapter 4
Example 4.1
A bent beam thermal actuator has a rectangular cross-section defined by
the width w and the thickness t. Known are the following material properties
which correspond to polysilicon: E = 130 GPa and For a
temperature increase of analyze the influence of the geometry
defining the bent beam on the free displacement.

Solution:
Figures 4.5 and 4.6 are two plots showing the variation of the output
displacement in terms of the defining geometry. For the simulation of Fig.
4.5 it has been considered that and

Figure 4.5 Free displacement in a bent beam as a function of beam length and inclination
angle

Figure 4.6 Free displacement in a bent beam as a function of cross-section width

The simulation of Fig. 4.6 took the same numerical values‚ except for w‚
which is the variable here‚ and for and It can be seen that
the free displacement decreases in a non-linear fashion when the inclination