Page 203 - Mechanics of Microelectromechanical Systems
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190 Chapter 4
Figure 4.8 Bloc force in a bent beam as a function of cross-sectional width and thickness
Example 4.3
Compare a fixed-free bar and a bent beam half model in terms of their
free displacement and bloc force assuming they have identical lengths‚ cross-
sections‚ material properties and are subjected to the same temperature
increase.
Solution:
It is useful to analyze the following two ratios that relate the output
displacement and bloc force of the two thermal actuators‚ namely:
where the subscripts bb and s denote bent beam and straight‚ respectively.
Figure 4.9 Bent beam versus straight bar in terms of free displacement as a function of
inclination angle and length
By using Eqs. (4.8) and (4.6)‚ the first ratio of Eq. (4.10) becomes:
