Page 212 - Mechanics of Microelectromechanical Systems
P. 212
4. Microtransduction: actuation and sensing 199
this design‚ which creates a differential sensing capacity that increases the
overall reading performance.
Figure 4.21 Electrostatic transverse transduction microdevice (MUMPS technology)
Similarly‚ Fig. 4.22 shows another MUMPs device that realizes
transduction by using the longitudinal principle.
Figure 4.22 Electrostatic longitudinal transduction microdevice (MUMPS technology)
3.2 In-Plane Transverse (Parallel-Plate) Transduction
3.2.1 Actuation
According to the motion direction 1 of Fig. 4.19‚ and when the mobile
plate moves a distance x from its initial position‚ the capacitance of a
transverse-type transducer is:
