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28    1 From Optical MEMS to Micromechanical Photonics
                            others







                                     (1.5)tunable                                               LIGA,
                            III–V  compound  (GaAs,  InP)  LD,  (1.16)  I  PD, tunable  (1.15)  I







                                     M   M                                filter,  (1.25)        L:
                            metal    DMD,                                 tunable  L            photoforming,






                         Continued  polymer,  polyimide,  resin  M  pump,  (1.12)      microchannels,  (1.49)  M  M  µ-TAS,  (1.48)  P: deposition




                         1.2.            (1.20)mirror,                                          and
                         Table       M                                                          sputtering
                            dielectric,  quartz  (1.35)                                            Others
                                     (1.8)antenna,  M  1.7)  control  (1.75)  (1.38)  M  M  length  etching,  O:  diode,











                                     M   I  head,  probe,  (1.6,  M  (1.40)  M  length  M  mirror,  (1.76)  M  M  stage,  M micro-pump,  probe,  (1.33)  M  nano-tracking,  focal  (1.77)  M  lithography,  laser  a
                            silicon  slider,  optical  bow-tie  (1.46)  switch,  switch,  focal  shutter,  XYZ  (1.52)  diagnosis  (1.53)  scanner,  (1.9)  valiable  lens,  including  of integration





                            force                                                               micromachining

                            of       electrostatic                      electromagnetic  piezoelectric  monolithic
                            kinds                                                      others   M:  I:
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