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1.5 Future Outlook of Optical MEMS and Micromechanical Photonics  27
                                opto-                                                      (1.56)

                                and                                                        O
                                Waveguides  others                                         battery,





                                devices.  III–V  compound  (GaAs,  I encoder,  (1.68)  flow  blood  I  sensor,  (1.70)  LD,  (1.67)  I  I resonator,  (1.17)  head,  optical  (1.69)  I


                                photonics  InP)  probe,                       (1.55)tunable



                                micromechanical  metal  field  near  (1.19)    M  switch,







                                MEMS)and  polymer,  polyimide,  resin  P  rotor,  (1.63)  P  rotor,  (1.64)  P  rotor,  (1.65)  M  mixer,  (1.50,  1.66)  P  gripper,  (1.54)




                                (optical  shown  not



                                systems  are structures  dielectric,  quartz  M  rotor,  (1.62)


                                micro-electromechanical  mechanical  silicon  M  cell,  solar  1.58)  (1.57,  field  near  M  probe,  (1.74)










                                Optical  without  devices  pressure



                                1.2.  force  of                    photoelectric  photothermal  photoelectrochemical
                                Table  electronics  kinds  optical  optical
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